System for calibration of EUV detectors

Authors

  • Janusz Mikołajczyk Military University of Technology
  • Zbigniew Bielecki Military University of Technology
  • Mirosław Nowakowski Military University of Technology
  • Beata Rutecka Military University of Technology
  • Jacek Wojtas Military University of Technology

DOI:

https://doi.org/10.4302/photon.%20lett.%20pl.v1i2.30

Abstract

The paper presents a project of system for detectors investigation applied in metrology of extreme ultraviolet radiation. The main task of the work is determination both the detector responsivity and its spatial non-uniformity. At the setup, the laser-plasma source with gas-puff target will be used. Basing on measured parameters of the source, the requirements for the optical elements and measurement method have been specified. The special investigation procedure of the spatial non-uniformity of detectors responsivity is described. The preliminary results of the silicon photodiode investigations are also presented and discussed.

Author Biographies

Janusz Mikołajczyk, Military University of Technology

Institute of Optoelectronics

Zbigniew Bielecki, Military University of Technology

Institute of Optoelectronics

Mirosław Nowakowski, Military University of Technology

Institute of Optoelectronics

Beata Rutecka, Military University of Technology

Institute of Optoelectronics

Jacek Wojtas, Military University of Technology

Institute of Optoelectronics

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Published

2009-06-29

How to Cite

[1]
J. Mikołajczyk, Z. Bielecki, M. Nowakowski, B. Rutecka, and J. Wojtas, “System for calibration of EUV detectors”, Photonics Lett. Pol., vol. 1, no. 2, pp. pp. 70–72, Jun. 2009.

Issue

Vol. 1 No. 2 (2009)

Section

Articles

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