Simultaneous shape measurement and layers detection by means of low coherence interferometry and optical coherence tomography

Authors

  • Slawomir Tomczewski Warsaw Univ. of Technology
  • Anna Pakula Warsaw Univ. of Technology
  • Leszek Salbut Warsaw Univ. of Technology

DOI:

https://doi.org/10.4302/photon.%20lett.%20pl.v4i2.300

Abstract

In this paper authors show the application of low coherence interferometry and optical coherence tomography with non-Gaussian light source, which are applicable in simultaneous measurement of micromembrane and detection of layers deposited on silicon wafer. The exemplary measurement results obtained with laboratory setup are presented.

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References
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Author Biography

Slawomir Tomczewski, Warsaw Univ. of Technology

PhD student at Institute of Micromechanics and Photonics, Warsaw University of Technology, 8 Sw. A. Boboli St., 02-525 Warsaw.

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Published

2012-06-27

How to Cite

[1]
S. Tomczewski, A. Pakula, and L. Salbut, “Simultaneous shape measurement and layers detection by means of low coherence interferometry and optical coherence tomography”, Photonics Lett. Pol., vol. 4, no. 2, pp. pp. 57–59, Jun. 2012.

Issue

Vol. 4 No. 2 (2012)

Section

Articles

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